JPH03109331U - - Google Patents
Info
- Publication number
- JPH03109331U JPH03109331U JP1739790U JP1739790U JPH03109331U JP H03109331 U JPH03109331 U JP H03109331U JP 1739790 U JP1739790 U JP 1739790U JP 1739790 U JP1739790 U JP 1739790U JP H03109331 U JPH03109331 U JP H03109331U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning liquid
- semiconductor wafer
- circulation means
- cleaning tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 26
- 239000007788 liquid Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims 7
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1739790U JPH03109331U (en]) | 1990-02-26 | 1990-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1739790U JPH03109331U (en]) | 1990-02-26 | 1990-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109331U true JPH03109331U (en]) | 1991-11-11 |
Family
ID=31520609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1739790U Pending JPH03109331U (en]) | 1990-02-26 | 1990-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109331U (en]) |
-
1990
- 1990-02-26 JP JP1739790U patent/JPH03109331U/ja active Pending
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